KSM

Ferrofluidic Seal

Ferrofluidic Seal란?

자성을 띠는 유체를 이용하여 유체 오링을 형성하여 자기장으로 구속하는 원리의 밀봉장치
회전운동을 진공 챔버 내로 전달하는 등 완전한 회전축의 밀봉을 가능하게 하는 장치
반도체장비와 디스플레이산업의 진공용 로봇, 반도체장비의 웨이퍼 이송장치, LCD/OLED장비의 이송장치, 태양광산업의 Ingot 성장장비 등에 사용

30년 이상의 경험 및 기술로 설계 시간 단축
다양한
어플리케이션 가능
대량 예측 생산에 의한 단·납기 대응

SML Series

SML Series

SML Series

Where to Buy Where to Buy

TYPE Miniature Feedthroughs

SHAFT DIAMETER

Shaft Diameter	004	005	006
A	4⁺⁰_-0.018	5⁺⁰_-0.018	6⁺⁰_-0.018
E	^{0.5 Dp}_{10 Lg.}	^{0.5 Dp}_{10 Lg.}	^{0.5 Dp}_{10 Lg.}

MODEL NUMBER

Model Number	SML 004 NN	SML 005 NN	SML 006 NN
Torque capacity[㎏ · ㎝]	5.8	6.4	6.4
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	2.0
Temperature range[℃]	상온~80
Gas compatibility	Inert Gas**
Bearign Type*	686	686	686
Bearing material	SUS440C
Housing material	SUS303
Shaft material	SUS630

SSL Series

SSL Series

SSL Series

Where to Buy Where to Buy

TYPE Miniature Feedthroughs

SHAFT DIAMETER

Shaft Diameter	004	005	006
A	4⁺⁰_-0.018	5⁺⁰_-0.018	6⁺⁰_-0.018
B	76.5	76.5	76.5
E	^{0.5 Dp}_{10 Lg.}	^{0.5 Dp}_{10 Lg.}	^{0.5 Dp}_{10 Lg.}
F	15	15	15

MODEL NUMBER

Model Number	SSL 004 NN	SSL 005 NN	SSL 006 NN
Torque capacity[㎏ · ㎝]	5.8	6.4	6.4
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	2.0
Temperature range[℃]	상온~80
Gas compatibility	Inert Gas**
Bearign Type*	686	686	686
Bearing material	SUS440C
Housing material	SUS303
Shaft material	SUS630

SNL/SNF Series

SNL/SNF Series

SNL/SNF Series

Where to Buy Where to Buy

TYPE Through Hole Mount Feedthroughs

SHAFT DIAMETER

Shaft Diameter	006	010
A	6⁺⁰_-0.018	10⁺⁰_-0.022
B	97.5	119.5
C	57.5	69.5
D	M32 X 1.5	M38 X 1.5
E	0.5Dp. X 12Lg.(Flat)	3W X 1.8Dp. X 14Lg.
F	20	25
J	55	60
K	10	10
P	49	55

MODEL NUMBER

Model Number	SNL 006 NN	SNF 006 NN	SNL 010 NN	SNF 010 NN
Torque capacity[㎏ · ㎝]	9.7	9.7	62	62
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	2.5	2.0	2.5	2.0
Temperature range[℃]	상온~80
Gas compatibility	Inert	Reactive	Inert	Reactive
Bearign Type*	627	627	6001	6001
Bearing material	SUS440C
Housing material	SUS303	SUS304	SUS303	SUS304
Shaft material	SUS630	SUS630	SUS630	SUS630

STL/STF Series

STL/STF Series

STL/STF Series

Where to Buy Where to Buy

TYPE Through Hole Mount Feedthroughs

SHAFT DIAMETER

Shaft Diameter	012	020
A	12⁺⁰_-0.027	20⁺⁰_-0.033
B	179	211
C	109	121
D	M25 X 1.5	M30 X 1.5
E	4W X 2.5Dp. X 20Lg.	3W X 1.8Dp. X 14Lg.
F	40	55
J	48	63
K	74	82
L	36.5	40.5

MODEL NUMBER

Model Number	STL 012 NN	STF 012 NN	STL 020 NN	STF 020 NN
Torque capacity[㎏ · ㎝]	124	124	615	615
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	2.5	2.0	2.5	2.0
Temperature range[℃]	상온~80
Gas compatibility	Inert	Reactive	Inert	Reactive
Bearign Type*	6002	6002	6005	6005
Bearing material	SUS440C
Housing material	SUS303	SUS304	SUS303	SUS304
Shaft material	SUS630	SUS630	SUS630	SUS630

SFL/SFF Series

SFL/SFF Series

SFL/SFF Series

Where to Buy Where to Buy

TYPE Flange Mount Feedthroughs

SHAFT DIAMETER

Shaft Diameter	006	010	012	020
A	6⁺⁰_-0.018	10⁺⁰_-0.022	12⁺⁰_-0.027	20⁺⁰_-0.033
B	97.5	119.5	133.5	151.5
C	57.5	69.5	73.5	81.5
D	38	44	48	63
E	0.5Dp. X 12Lg.(Flat)	3W X 1.8Dp. X 14Lg.	4W X 2.5Dp. X 20Lg.	6W X 3.5Dp. X 25Lg.
F	20	25	30	35
J	80	80	90	105
K	10	10	10	10
L	18	24	27	31
N	PD60/4-∅10	PD60/4-∅10	PD70/4-∅10	PD85/4-∅10

MODEL NUMBER

Model Number	SFL 006 NN	SFF 006 NN	SFL 010 NN	SFF 010 NN	SFL 012 NN	SFF 012 NN	SFL 020 NN	SFF 020 NN
Torque capacity[㎏ · ㎝]	9.7	9.7	62	62	124	124	615	615
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	2.5	2.0	2.5	2.0	2.5	2.0	2.5	2.0
Temperature range[℃]	상온~80
Gas compatibility	Inert	Reactive	Inert	Reactive	Inert	Reactive	Inert	Reactive
Bearign Type*	627	627	6001	6001	6002	6002	6005	6005
Bearing material	SUS440C
Housing material	SUS303	SUS304	SUS303	SUS304	SUS303	SUS304	SUS303	SUS304
Shaft material	SUS630	SUS630	SUS630	SUS630	SUS630	SUS630	SUS630	SUS630

리스트 보기

SFL Series

SFL Series

SFL Series

Where to Buy Where to Buy

TYPE Heavy Duty Feedthrouhs

SHAFT DIAMETER

Shaft Diameter	020	025	030	040	050
A	20⁺⁰_-0.033	25⁺⁰_-0.033	30⁺⁰_-0.033	40⁺⁰_-0.039	50⁺⁰_-0.039
B	255	288	321	357	406
C	135	138	141	157	166
D	85	95	105	125	140
E	6W X 3.5Dp. X 50Lg.	7W X 4Dp. X 63Lg.	10W X 5Dp. X 80Lg.	12W X 5Dp. X 90Lg.	14W X 5.5Dp. X 110Lg.
F	60	75	90	100	120
J	145	160	160	185	210
K	18	18	20	22	24
L	48	50	50	55.5	59.5
M	29	29	29	33	33
N	PD120/6-∅12	PD135/6-∅12	PD135/6-∅12	PD160/8-∅12	PD185/8-∅12

리스트 보기

MODEL NUMBER

Model Number		SFL 020 WH	SFL 025 WH	SFL 030 WH	SFL 040 WH	SFL 050 WH
Torque capacity[㎏ · ㎝]		606	1066	1706	3413	6106
Degree of vacuum pressure ㎩.[Torr]		10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]		<10^-12
Leakage rate(He) [Torr · ℓ /sec]		<10^-11
Pressure capacity (Static)[㎏/㎠]		3.0
Temperature range[℃]		상온~80
Gas compatibility		Inert Gas
Bearign Type*	VAC	7206CDF	7207CDF	7208CDF	7210CDF	7212CDF
Bearign Type*	ATM	6205	6206	6207	6209	6211
Bearing material		SUJ2
Housing material		SUS303
Shaft material		SUS630

리스트 보기

HTL Series

HTL Series

HTL Series

Where to Buy Where to Buy

TYPE Cartridge Type Feedthroughs

SHAFT DIAMETER

Shaft Diameter	010	020	025	030	040	050	075
A	10^+0.03_+0.01	20^+0.04_+0.02	25^+0.04_+0.02	30^+0.04_+0.02	40^+0.05_+0.02	50^+0.05_+0.02	10^+0.06_+0.03
B	78	82.5	88	93	96	89	115
C	64	68.5	74	79	80	82	96
D	48⁺⁰_-0.02	58⁺⁰_-0.03	63⁺⁰_-0.03	73⁺⁰_-0.03	88⁺⁰_-0.04	98⁺⁰_-0.04	137⁺⁰_-0.04
E	34	44	49	54	69	79	109
F	10	10	10	10	12	12	15
∅G	10^-0.01_-0.03	20^-0.01_-0.03	25^-0.01_-0.03	30^-0.01_-0.03	40^-0.01_-0.03	50^-0.01_-0.03	75^-0.01_-0.04
∅H	48^+0.05_+0.03	58^+0.06_+0.03	63^+0.06_+0.03	73^+0.06_+0.03	88^+0.07_+0.04	98^+0.07_+0.04	137^+0.08_+0.05

리스트 보기

MODEL NUMBER

Model Number	HTL 010 CN	HTL 020 CN	HTL 025 CN	HTL 030 CN	HTL 040 CN	HTL 050 CN	HTL 075 CN
Torque capacity[㎏ · ㎝]	-
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	3.0
Temperature range[℃]	상온~80
Gas compatibility	Inert Gas
Bearign Type*	16003	6906	6907	6908	6910	6912	6918
Bearing material	SUJ2
Housing material	SUS303
Shaft material	SUS630

HFL Series

HFL Series

HFL Series

Where to Buy Where to Buy

TYPE Flange Type Feedthroughs

SHAFT DIAMETER

Shaft Diameter	010	020	025	030	040	050	075
A	10^+0.03_+0.01	20^+0.04_+0.02	25^+0.04_+0.02	30^+0.04_+0.02	40^+0.05_+0.02	50^+0.05_+0.02	75^+0.06_+0.03
B	78	82.5	88	93	96	98	115
C	64	68.5	74	79	80	82	96
D	51	63	73	78	90	103	143
E	34	44	49	54	69	79	109
F	10	10	10	10	12	12	15
∅G	10^-0.01_-0.03	20^-0.01_-0.03	25^-0.01_-0.03	30^-0.01_-0.03	40^-0.01_-0.03	50^-0.01_-0.03	75^-0.01_-0.04
J	90	105	120	120	145	160	210
K	10	10	10	10	10	12	12
L	20	22.5	26	27	27	26.5	33
N	PD70/4-∅10	PD85/4-∅10	PD100/4-∅10	PD100/4-∅10	PD120/4-∅12	PD135/4-∅12	PD185/8-∅12

리스트 보기

MODEL NUMBER

Model Number	HFL 010 CN	HFL 020 CN	HFL 025 CN	HFL 030 CN	HFL 040 CN	HFL 050 CN	HFL 075 CN
Torque capacity[㎏ · ㎝]	-
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	3.0
Temperature range[℃]	상온~80
Gas compatibility	Inert Gas
Bearign Type*	16003	6906	6907	6908	6910	6912	6918
Bearing material	SUJ2
Housing material	SUS303
Shaft material	SUS630

PD Series

PD Series

PD Series

Where to Buy Where to Buy

TYPE Cantileverd Seal Type Feedthroughs

SHAFT DIAMETER

Shaft Diameter	020	025	030	040	050
A	20^+0.04_+0.02	25^+0.04_+0.02	30^+0.04_+0.02	40^+0.05_+0.02	50^+0.05_+0.02
B	123.5	126	130.5	141	147.5
C	109.5	112	116.5	125	131.5
D	78	90	96	106	132
E	44	49	54	69	79
F	10	10	10	12	12
∅G	20^-0.01_-0.03	25^-0.01_-0.03	30^-0.01_-0.03	40^-0.01_-0.03	50^-0.01_-0.03
J	120	145	145	160	185
K	10	10	10	12	12
L	14.5	13	14	12	12.5
N	PD100/4-∅10	PD120/4-∅12	PD120/4-∅12	PD135/4-∅12	PD160/8-∅12

리스트 보기

MODEL NUMBER

Model Number	PD 100 4-∅10	PD 120 4-∅10	PD 120 4-∅10	PD 135 4-∅10	PD 135 4-∅10
Torque capacity[㎏ · ㎝]	-
Degree of vacuum pressure ㎩.[Torr]	10^-6[10^-8]
Leakage rate(He) [㎩/㎥/sec]	<10^-12
Leakage rate(He) [Torr · ℓ /sec]	<10^-11
Pressure capacity (Static)[㎏/㎠]	3.0
Temperature range[℃]	상온~80
Gas compatibility	Reactive Gas
Bearign Type*	7206CDB	7207CDB	7208CDB	7210CDB	7212CDB
Bearing material	SUJ2
Housing material	SUS304(SUS316:OPTION)
Shaft material	SUS630

리스트 보기